A MANUFACTURING METHOD AND A MANUFACTURING APPARATUS OF TRICHLOROSILANE(SIHCL3) USING THE METAL CATALYST

摘要

PURPOSE: The high conversion yield can be obtained since consecutively manufacturing trichlorosilane. By the metallic catalyst being in reactor mount and using the conversion ratio of trichlorosilane is enhanced and the manufacture possible under the low reaction temperature and the low reaction pressure. CONSTITUTION: The trichlorosilane manufacturing device using the metallic catalyst. With the hydrogen supply source(7) for supplying the hydrogen to the silicon tetrachloride tank(8). With the silicon tetrachloride tank for the hydrogen being provided from the hydrogen supply source through the piping and making the bubbling [bubbling] and injecting to the barrel-type reactor(9). It reacts to the bubbled fluid which is inserted from the silicon tetrachloride tank through the piping and trichlorosilane is created.