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发明名称
HIGH PRECISION POSTURE CONTROL METHOD OF X-RAY MIRROR
摘要
申请公布号
EP2045820(A4)
申请公布日期
2010.08.18
申请号
EP20070790860
申请日期
2007.07.17
申请人
JTEC CORPORATION;OSAKA UNIVERSITY
发明人
YAMAUCHI, KAZUTO;MIMURA, HIDEKAZU;OKADA, HIROMI
分类号
G21K1/06;G02B5/10;G02B7/198
主分类号
G21K1/06
代理机构
代理人
主权项
地址
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