PREPARTION METHOD FOR TRANSPARENT CONDUCTING FILM COATED BY AZO/Ag/AZO MULTILAYER

摘要

PURPOSE: A method for manufacturing a transparent conductive film coated with an AZO/Ag/AZO multi-layered thin film is provided to improve stability against damp heat treatments and the bending stress of a transparent conductive film. CONSTITUTION: A method for manufacturing a transparent conductive film coated with an AZO/Ag/AZO multi-layered thin film comprises the steps of: forming a first AZO thin film on a substrate with a sputtering method using Al-doped ZnO as a target, depositing Ag on the first thin film with a sputtering method, and forming a second AZO thin film on a Ag thin film with a sputtering method using Al-doped ZnO as a target.