| 发明名称 |
COATING FOR GAS BEARING |
| 摘要 |
The invention relates to a vacuum pump in which the gas bearing is coated with a hard layer, and to a process for preparing such gas bearing of a vacuum pump.
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| 申请公布号 |
US2010202880(A1) |
申请公布日期 |
2010.08.12 |
| 申请号 |
US20070298547 |
申请日期 |
2007.04.19 |
| 申请人 |
OERLIKON LEYBOLD VACUUM GMBH |
发明人 |
BLUMENTHAL ROLAND;FROITZHEIM MICHAEL |
| 分类号 |
F04D29/056;C23C16/44;C23F1/00;C25D5/00 |
主分类号 |
F04D29/056 |
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