发明名称 |
Verfahren und Vorrichtung zur Regelung der Herstellung von Drahtbondverbindungen |
摘要 |
<p>The invention relates to a method for generating a wire bond between a wire (3) and an electrical contact member (4), the method comprising the steps of: pressing a first surface (A(t)) of a portion (3a) of the wire (3) against a second surface (S) of the electrical contact member (4) with a first force (F nb ) normal to the second surface while vibrating the portion of the wire along the second surface in order to generate a bond; measuring the time dependent vibration amplitude (a(t)) of the portion (3a) of the wire (3) at a number of discrete time steps during the generation of the bond; measuring the time dependent deformation (z(t)) of said portion of the wire due to said applied first force and said vibration at a number of discrete time steps during the generation of the bond; and generating a time dependent first signal (F s (t)) from at least said vibration amplitude and said deformation at a number of discrete time steps during the generation of the bond that is a direct measure of the stability of the bond at the respective time step. The invention also relates to a device for generating this kind of bonds, wherein an analysing device (9) is provided that is adapted to generate a time dependent first signal (F s (t)) from at least said vibration amplitude and said deformation of the wire at a number of discrete time steps during generation of the bond, wherein said first signal is a direct measure of the stability of the bond at the respective time step.</p> |
申请公布号 |
DE602006015192(D1) |
申请公布日期 |
2010.08.12 |
申请号 |
DE20066015192T |
申请日期 |
2006.09.05 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;TECHNISCHE UNIVERSITAET BERLIN |
发明人 |
GAUL, HOLGER;REICHL, HERBERT PROF. DR.-IN;SCHNEIDER-RAMELOW, MARTIN;LANG, KLAUS-DIETER;GEISSLER, UTE |
分类号 |
B23K20/00;H01L21/00;H01L21/607 |
主分类号 |
B23K20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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