| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon-made nozzle substrate etc. which can improve assemblability by reducing mechanical stress and preventing chipping or breakage due to friction or the like during assembling while aligning with other substrates. Ž<P>SOLUTION: The silicon-made nozzle substrate is provided with an alignment hole 15 and a truck hole 16 for aligning by inserting a positioning pin 51 when assembling with other substrates 2, 3, sectional areas of the holes 15, 16, parallel to a substrate surface, are gradually increased toward a liquid introduction surface 1b side, and shapes of sections vertical to the substrate surface have index curves. At this time, the alignment hole 15 is formed of a continued curved surface of a rotator having a central axis vertical to the substrate surface, and a sectional shape including the axis has linear symmetric index curves with the central axis as a symmetric axis. Angles formed by tangents of the sidewall of the alignment hole 15 and of the sidewall of the truck hole 16 at the liquid introduction surface 1b, and a perpendicular of the substrate surface are 0-10°. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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