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发明名称
摘要
申请公布号
JP4522916(B2)
申请公布日期
2010.08.11
申请号
JP20050186526
申请日期
2005.06.27
申请人
发明人
分类号
H01L21/318;H01L21/8242;H01L21/8247;H01L27/108;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/318
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