发明名称 METHOD FOR FORMING SELECTIVE EMITTER OF SOLAR CELL AND DIFFUSION APPARATUS FOR FORMING THE SAME
摘要 A method for forming a selective emitter of a solar cell and a diffusion apparatus for forming the same are provided. The method includes texturing a surface of a silicon substrate by etching the silicon substrate, coating an impurity solution on the surface of the silicon substrate, injecting a first thermal energy into the whole surface of the silicon substrate, and, while the first thermal energy is injected into the whole surface of the silicon substrate, injecting a second thermal energy by irradiating a laser beam into a partial region of the surface of the silicon substrate.
申请公布号 US2010197061(A1) 申请公布日期 2010.08.05
申请号 US20090505305 申请日期 2009.07.17
申请人 HUH YUNSUNG;PARK SEUNGIL;LEE MANGEUN 发明人 HUH YUNSUNG;PARK SEUNGIL;LEE MANGEUN
分类号 H01L31/18;B05C11/00;H01L31/068 主分类号 H01L31/18
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