Deflection characteristics linearization device for scanner applications, has control section for controlling order of piezoactuator to control linearity by compensation of odd harmonics in frequency spectrum of control signal

摘要

The device has a controller comprising a charge amplifier, and a feedback branch with a feedback condenser exhibiting nonlinear characteristics. A load piezoactuator is made of a material with similar piezoelectric characteristics of that of the feedback condenser to compensate piezo-hysteresis effect. An approximating unit for approximating a control signal by a polynomial is arranged at an input side of a control section. The control section controls order of the piezoactuator to control linearity by compensation of odd harmonics in a frequency spectrum of the control signal.