CONTACT TYPE PROBE USING FLEXIBLE WIRE

摘要

PURPOSE: A contact type probe using a flexible wire is provided to improve the adaptability with respect to the height variation of a measurement target by securing a height margin as much as the bent length of the flexible wire. CONSTITUTION: A probe is combined with the failure inspecting unit with respect to a pattern electrode(15) and pressing and transferring unit(50). The pattern electrode is contacted with a flexible wire(40). The pattern electrode scans the vertical direction of the pattern electrode using the flexible wire which is bent to a scanning direction. The probe touches the upper side of the pattern electrode in order to inspect a disconnection failure and a short circuit failure.