| 摘要 |
<p>A plasma processing apparatus able to secure traceability in plasma processing. The plasma processing apparatus is provided with a data recording unit (35), a history information storage unit (41), and a manufacturing history file creation unit (42a). Each time plasma processing on an article to be processed ends, the data recording unit reads time data, article identifying data, machine output data showing the operation state of the matching device (18), etc., and judgment data showing the results of judgment of quality by a discharge state detection unit (34) and stores them, time sequentially, in a history information storage unit. Based on a designated period or time, the manufacturing history file creation unit reads, from the history information storage unit, time data (41k), processed work information (41j) including article identifying data, machine output data (41c), and judgment data (41f), and creates a manufacturing history file useful in traceability.</p> |
