| 摘要 |
PROBLEM TO BE SOLVED: To reduce the array pitch of a probe and to enable an electrode section to be used for a conduction test of a densely-arranged specimen. SOLUTION: The probe includes a needle body which extends laterally and a needlepoint which is bent obliquely and downward, from one end of the needle body. In the needle body and the needlepoint, a region having an oval or rectangular cross-sectional shape with the dimension in the forward-backward direction smaller than the dimension in the vertical or lateral direction is provided at the boundary between the needle body and the needlepoint and in its vicinity. COPYRIGHT: (C)2010,JPO&INPIT
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