PURPOSE: A susceptor is provided to reduce a cooling time to an appropriate temperature for replacing components by uniformly cooling the entire area of the susceptor in a short time. CONSTITUTION: A susceptor body is horizontally installed such that a substrate is loaded on the upper side of the susceptor body. A plurality of coolant-pipes with inlets and outlets is installed to the susceptor body. A susceptor shaft supports the susceptor body. The susceptor shaft includes a supplying path(104) and an exhausting path(112) for coolant. A coolant-divider(100) guides coolant collected from the outlets of the coolant-pipes to the exhausting path. The coolant-divider includes an inlet hole(102) connecting with the supplying path and a connecting groove(106).
