| 摘要 |
PROBLEM TO BE SOLVED: To provide an immersion microscope objective lens that has long operation distance and has sufficiently corrected aberrations in a wide wavelength region (substantially h-line to t-line). SOLUTION: This immersion microscope objective lens includes: in order from an object, a first lens group G1 having positive refractive power as a whole and having a cemented lens L1 of a plano convex lens having a plane facing the object and a meniscus lens having a concave surface facing the object, and a single meniscus lens L2 having a convex surface facing the object; a second lens group G2 having positive refractive power as a whole and having a plurality of cemented lenses L3-L6; and a third lens group G3 having negative refractive power as a whole and having a cemented meniscus lens L7 having a concave surface facing an image, and a cemented meniscus lens L8 having a concave surface facing the object. And the following conditional expressions 0.12<d0/f<0.25, 0.04<θCt(p)-θCt(n)<0.09 and -0.03<θhg(p)-θhg(n)<0.00 are satisfied. COPYRIGHT: (C)2010,JPO&INPIT
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