Verfahren zur Herstellung eines Dünnfilms,申请号DE20016042320-传众专利搜索

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发明名称	Verfahren zur Herstellung eines Dünnfilms
摘要
申请公布号	DE60142320(D1)	申请公布日期	2010.07.22
申请号	DE20016042320	申请日期	2001.03.12
申请人	CANON K.K.	发明人	ANDO, KENJI;OTANI, MINORU;SUZUKI, YASUYUKI;SHINGU, TOSHIAKI;BIRO, RYUJI;KANAZAWA, HIDEHIRO
分类号	C23C14/06;C23C14/00	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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