| 摘要 |
Disclosed herein is a computer programmed to carry out a method for reducing directional error in scanned intensity values. The method includes scanning some rows of a substrate in a first direction, and some rows of the substrate in a second, different, direction, in order to obtain intensity values exhibited by various regions of the various rows. The intensity values from rows scanned in the first direction are analyzed, and the intensity values from rows scanned in the second direction are analyzed, in order to determine the directional error. The intensity values from rows scanned in the first direction and the intensity values from rows scanned in the second direction are then adjusted to reduce the directional error.
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