IMPRINT APPARATUS

摘要

PURPOSE: An imprint apparatus is provided to pattern various functional patterns on a chemical layer of a substrate by bonding the substrate with a stamp with an imprint method. CONSTITUTION: A chamber unit(2) provides a chamber with a preset size. A loading unit(4) loads a substrate inside the chamber unit. A stamp(6) is arranged to face one side of the substrate of the loading unit and is bonded with an imprint method. A first separation unit(8) firstly separates the edge of the stamp bonded with the substrate from the substrate. A second separation unit secondly separates the remaining part of the stamp from the substrate.