| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spin coating apparatus which forms a coating film with high quality such as with uniform film thickness, without including foam and the like by the spin coating. Ž<P>SOLUTION: The spin coating apparatus 1 is provided with a rotation part 2 which holds a disc substrate 5 having a central aperture 51 in an approximately horizontal state to rotatively drive and a nozzle part 3 which discharges a coating liquid d wherein the nozzle part 3 has a discharge mouth 31 to drop the coating liquid d to continual circles that are concentric with the central aperture 51 at the proximity of the central aperture 51 of the disc substrate 5. The discharge mouth 31 consists of a circular slit 32 or consists of many apertures 34 with a finely small diameter, which are formed annularly in an annexed state. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
