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发明名称
VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERELEMENT
摘要
申请公布号
DE60044470(D1)
申请公布日期
2010.07.08
申请号
DE2000644470
申请日期
2000.06.23
申请人
FUJITSU LTD.
发明人
HORIUCHI, HIROSHI;YAMAMOTO, TAMOTSU;TAKIGAWA, YUKIO;SUZUKI, SHIGERU;SANTO, NOBUAKI;MIYAJIMA, MOTOSHU
分类号
H01L21/304;H01L21/02;H01L21/321;H01L21/768;H01L23/532
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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