MOLECULE DETECTING ELEMENT AND SYSTEM

摘要

PROBLEM TO BE SOLVED: To improve desorption property and repeatability and to detect the category of a specimen gas and concentration thereof simultaneously by using relative interaction (physical adsorption) of an adsorption molecule to an insulating layer and the function of detecting dielectric property thereof.

SOLUTION: The invention uses a field-effect transistor FET including a MIS capacitor structure or MIS capacitor structure composed of a metallic layer, an insulating layer, and a semiconductor layer. The insulating layer is formed by coating a molecule adsorbing particle insulating layer to a substrate of an electrically inactive material with a number of penetration pores. The semiconductor layer is formed on one side of the insulating layer and the metallic layer on the other side, which are constructed so that a gas to be detected or a liquid is passed through the penetration pores.

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