| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique which can form a film rapidly without generating a void for an object having a concave portion on the front surface. Ž<P>SOLUTION: There is provided a device for forming a film on an object having a concave portion on the front surface. The device includes an airtight container for housing the object, a gas introduction hole for introducing material gas into the airtight container, liquefying means for liquefying the material gas in the airtight container, and heating means for heating the object in the airtight container. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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