HALF TONE MASK AND FABRICATING METHOD

摘要

A half tone mask and a fabricating method is disclosed where the half tone mask capable of adjusting optical transmittance is provided by stacking translucent materials, wherein the optical transmittance can be implemented that is built up through data base based on, not the theoretical behavior characteristic, but on the actual process, whereby the half tone mask having a transmittance in a wide range of regions, rather than a transmittance in a particular region, can be provided.