发明名称 CAPACITOR AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A capacitor and a method of manufacturing the same are provided to secure capacitance higher than planar capacitor by forming a bottom electrode, an insulating layer, and top electrode in uneven shape. CONSTITUTION: An interlayer dielectric layer(220) having uneven structures on a semiconductor substrate(210) is formed. A bottom electrode(225) having the uneven structure corresponding to the interlayer dielectric layer by depositing the metal material on the interlayer dielectric layer. A top electrode(240) having the uneven structure corresponding to the interlayer dielectric layer by depositing the metal layer on the surface of the insulating layer.
申请公布号 KR20100073462(A) 申请公布日期 2010.07.01
申请号 KR20080132147 申请日期 2008.12.23
申请人 DONGBU HITEK CO., LTD. 发明人 PARK, YOUNG TAEK
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
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