Semiconductor device having deep through vias

摘要

A semiconductor device includes a body (1) and, in the body (1): a semiconductor substrate (2), a semiconductor structural layer (10) and a dielectric layer (12) therebetween. A through interconnection via (30) traverses the body (1) and extends through the dielectric layer (12). The through interconnection via (30) has: a front-side interconnection region (17), including a portion of the structural layer (10) that extends between the dielectric layer (12) and a front face (10a) of the body (1) and is laterally insulated from the remainder of the structural layer (10); a back-side interconnection region (27), including a portion of the substrate (2) that extends between the dielectric layer (12) and a back face (2a) of the body (1) and is laterally insulated from the remainder of the substrate (2) by a back-side insulation trench (29). The back-side insulation trench (29) extends across the entire substrate (2; 102; 202), from the back face (2a) of the body (1) to the dielectric layer (12) the; and a conductive continuity region (8) connecting the front-side interconnection region (17) and the back-side interconnection region (27) through the dielectric layer (12).