发明名称 THERMO CONTROLLER
摘要 PROBLEM TO BE SOLVED: To provide a fluid temperature adjusting device for fluid which maintains high sealing performance in a heat transfer chamber and accurately controls the fluid temperature, even in an environment which temperature cycle is repeated by cooling and heating. SOLUTION: The device includes a heat transfer block 1, which prepares at least one inflow opening and one outflow opening of fluid and a concave part, that forms a part of the heat transfer room 10 adjusting the temperature of the fluid buy passing of the fluid; a heat transfer block 2 which forms the heat transfer room by covering the concave part of the heat transfer block; a holding part 60 which is a holding part for holding so that a point of contact between the heat transfer block and a heat transfer board is stuck tightly, and which holds the heat transfer block and the heat transfer board using an elastic body so as to prevent plastic deformation of the heat transfer block by the expansion and contraction of the elastic body, following thermal expansion or contraction of the heat transfer block; and a temperature-adjusting part 50, which conduct heat exchange between the fluid passing the heat transfer room via the heat transfer board. COPYRIGHT: (C)2004,JPO
申请公布号 KR100965446(B1) 申请公布日期 2010.06.24
申请号 KR20030014342 申请日期 2003.03.07
申请人 发明人
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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