发明名称 METHOD OF RECYCLING CHEMICAL AND METHOD OF PERFORMING A CHEMICAL PROCESS USING THE SAME
摘要 PURPOSE: A refresh method of a chemical and an implementing method of a chemical process using the same are provided to eliminate a foreign material without a damage or a denaturation of a process chemical using a carbon dioxide fluid including a characteristic of low temperature, a non-toxic and a non-sparkling. CONSTITUTION: A foreign material is extracted with reacting a chemical to a carbon dioxide fluid(S110). The extracted foreign material is separated from the chemical and the carbon dioxide fluid(S120). The chemical is collected with separating the carbon dioxide fluid and the chemical each other(S130). It examines whether amount of the foreign material included in the chemical is the predetermined standard value or less or not(S140). The chemical is recycled in case amount of the foreign material included in the chemical is less than the predetermined standard value.
申请公布号 KR20100067840(A) 申请公布日期 2010.06.22
申请号 KR20080126409 申请日期 2008.12.12
申请人 DONGJIN SEMICHEM CO., LTD. 发明人 KIM, SEONG BAE;LEE, SUNG HYUN;YOO, HYUN SEOK;KIM, BYUNG UK
分类号 H01L21/302;H01L21/304 主分类号 H01L21/302
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