| 发明名称 |
METHOD FOR REUSE OF WAFERS FOR GROWTH OF VERTICALLY- ALIGNED WIRE ARRAYS |
| 摘要 |
Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.
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| 申请公布号 |
KR20100067088(A) |
申请公布日期 |
2010.06.18 |
| 申请号 |
KR20107006756 |
申请日期 |
2008.07.18 |
| 申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
SPURGEON JOSHUA M.;PLASS KATHERINE E.;LEWIS NATHAN S.;ATWATER HARRY A. |
| 分类号 |
H01L21/20;H01L31/0232;H01L31/0352 |
主分类号 |
H01L21/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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