| 摘要 |
PROBLEM TO BE SOLVED: To provide a pendulum sensor by which slant movement of a pendulum body is carried out favorably without disturbing the slant movement of the pendulum body even if chemical fluid or the like is crystallized and stuck on a rotation axis of the pendulum body and a bearing part of a block. SOLUTION: This device includes the pendulum body 2 which slants around the rotation axis 2a pushed by edge part of a substrate conveyed horizontally, a sensor 8 which detects the slanting movement of the pendulum body 2, a block 5 having a bearing support part 5a in which the rotation axis 2a of the pendulum body 2 is freely inserted. While a first permanent magnet 3 is provided in the pendulum body 2, and a second permanent magnet 6 is provided in the block 5. The rotation axis 2a of the pendulum body 2 is levitated inside the bearing support part 5a of the block 5 by the repulsive force of both permanent magnets 3, 6. COPYRIGHT: (C)2010,JPO&INPIT |
