SILICA GLASS CRUCIBLE FOR PULLING UP SILICON SINGLE CRYSTAL AND METHOD FOR MANUFACTURING THEREOF

摘要

PURPOSE: A quartz glass crucible and a manufacturing method thereof are provided to suppress bubbles by preventing the inner side on the lower side of a crucible from being hollowed. CONSTITUTION: An outer layer is composed of a natural quartz glass layer(11). An inner layer is composed of a synthetic quartz glass layer(12). The synthetic quartz glass layer comprises a first synthetic quartz glass layer(12a) and a second synthetic quartz glass layer(12b). The first synthetic quartz glass layer is formed inside an area within a specific range from the center of the lower side(10B) of the crucible. The second synthetic quartz glass layer is formed in an area except the area where the first synthetic quartz glass layer is formed.