| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means for transferring chips accurately to a transfer destination by providing a control means that adjusts heads for chucking chips from a substrate wherein the chips to be transferred are placed and transferring them to a transfer destination, with first, second and third cameras for their mutual positions in a transfer apparatus. Ž<P>SOLUTION: The movement of a head 21 is imaged without stopping when a chip 16 is transferred from the transfer source 14 to the transfer destination 15, and the position of the chip is corrected while the head is moved, thereby permitting more accurate transfer work and shortening a tact time. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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