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发明名称
Method for manufacturing composite substrate on which wide bandgap semiconductor is laminated
摘要
申请公布号
AU2009325425(A1)
申请公布日期
2010.06.17
申请号
AU20090325425
申请日期
2009.12.10
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
SHOJI AKIYAMA
分类号
H01L21/02;H01L21/265
主分类号
H01L21/02
代理机构
代理人
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