| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device, having a semiconductor sensor chip for detecting pressure fluctuation, the semiconductor device for reducing the effect of an electromagnetic wave, such as sunlight, on the semiconductor sensor chip, without providing a separate member. Ž<P>SOLUTION: In the semiconductor device 1, the semiconductor sensor chip 5 for detecting the pressure fluctuation is loaded on a loading surface 3a of a substrate 3, the loading surface 3a and an upper part of the semiconductor sensor chip 5 are covered with a cover member 9, the substrate 3 and the cover member 9 form a hollow cavity S including the semiconductor sensor chip 5. The cover member 9 is formed of a plate-like member, a bowl-like wall 21 which is depressed from the outer surface 9a of the cover member 9 and projects from an inner surface 9b is formed integrally with the cover member; the bowl-like wall 21 is provided with an annular circumferential wall 23 rising from the inner surface 9b and a plate-like top plate wall 25, formed at the end of the circumferential wall 23 and formed in substantially parallel to the inner surface 9b; and a plurality of sound holes 27, which penetrate in the thickness direction of the circumferential wall and make the cavity S communicate with the outside are formed in the circumferential wall 23. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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