| 发明名称 |
LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD |
| 摘要 |
<p>Disclosed is a light source apparatus provided with: a reflective mirror having an aperture at which at least part of a lamp is arranged, and a concave-face shaped reflective surface that reflects the light emitted from the lamp and is provided at the periphery of the aperture; and a unit for supplying gas to the reflective surface, that leads gas to the reflective surface at least in the vicinity of the aperture.</p> |
| 申请公布号 |
WO2010067597(A1) |
申请公布日期 |
2010.06.17 |
| 申请号 |
WO2009JP06728 |
申请日期 |
2009.12.09 |
| 申请人 |
NIKON CORPORATION;KIKUCHI, TAKAYUKI;ABE, FUMIHIKO |
发明人 |
KIKUCHI, TAKAYUKI;ABE, FUMIHIKO |
| 分类号 |
F21S2/00;G03F7/20;H01L21/027 |
主分类号 |
F21S2/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
