BEAM IRRADIATION DEVICE

摘要

<P>PROBLEM TO BE SOLVED: To provide a beam irradiation device excellent in a vibration-damping function without fear of cost hike and capable of following high-speed oscillation. Ž<P>SOLUTION: The beam irradiation device makes ion beams or electron beams emitted from an accelerator incident into a sample in the chamber through a beam line equipped with a mass separation device by an electric field and/or a magnetic field as well as a beam focusing device. The beam irradiation device directly or indirectly detects fluctuation of the beams passing through the beam line against the sample, and controls the mass separation device and/or the beam focusing device so as to cancel fluctuation based on the oscillation of the detected beams against the sample. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž