| 摘要 |
PURPOSE: An apparatus for driving the valve plate of a vacuum gate valve is provided to reduce the installation area of a vacuum gate valve by installing a drive unit on the top of a moving space of the valve plate. CONSTITUTION: An apparatus for driving the valve plate of a vacuum gate valve comprises a drive unit, a link unit(20), and a base portion(10). The drive unit is installed on the top of the moving space of the valve plate(40) of the vacuum gate valve to provide a drive force to the valve plate. The link unit transfers the drive force of the drive unit to the valve plate. One end of the link unit is coupled with the drive unit and the other end is combined with the rear end of the valve plate. The base portion is installed on the moving space of the valve plate. A guide groove(11a) is formed on the bottom of the base portion. A support(12) is installed on one side of the base portion, wherein the drive unit is fixed.
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