| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum apparatus by which a chamber is evacuated in a vacuum atmosphere while suppressing a change in temperature in the chamber, to provide a light source apparatus, to provide an exposure apparatus, and to provide a method of manufacturing a device. <P>SOLUTION: The vacuum apparatus connected to the chamber 15 in which the vacuum atmosphere is produced includes: a turbo molecular pump 34 for evacuating the chamber 15 or a communication portion 36 communicating with the inside of the chamber 15; a radiant heat absorbing mechanism 46 arranged nearby the turbo molecular pump 34 and reducing radiant heat radiated from the turbo molecular pump 34 into the chamber 15; and a controller which controls the temperature of the radiant heat absorbing mechanism 46 to a preset temperature. <P>COPYRIGHT: (C)2010,JPO&INPIT |
