THIN FILM BATTERY HAVING ENHANCED SURFACE AREA OF ELECTRODE AND ENHANCED CONTACT AREA BETWEEN ELECTRODE AND ELECTROLYTE AND METHOD FOR PRODUCING THE SAME

摘要

A method for producing a thin film battery is provided to increase amount of an electrode and contact area between the electrode and electrolyte and to uniformly form thin film which successively are laminated on the etched face. A thin film battery comprises a substrate(10); a first collector(20) formed on the substrate; a cathode(30) formed on the first collector; an electrolyte layer(40) formed on the cathode; an anode(50) formed on the electrolyte layer; and a second collector contacted with the anode. Many grooves with hemi-circular section or semi-spherical grooves are formed on the surface of the substrate or the first collector. The other elements are deposited on the upper side of the substrate or the first collector through physical gas deposition.