| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heater unit exhibiting an excellent temperature rising characteristic in rapidly raising the temperature of an object to be heated in a low-temperature region. Ž<P>SOLUTION: The heater unit includes a plate-shaped silicon-carbide-containing heater part 1, a sample stand 3 mounted on an upper surface of the heater part 1 so as to mount the heated object and an adhesive 2 adhering the upper surface of the heater part 1 to a surface of sample stand 3 opposed to its heating object mounting surface and has a laminated and integrated structure. The sample stand is preferably made of an aluminum-nitride-containing material. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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