| 摘要 |
PURPOSE: A substrate transport apparatus is provided to improve the transporting reliability of a substrate. CONSTITUTION: A substrate transport apparatus(100) comprises: a plurality of transporting shaft(120) which is parallelly arranged each other; a support plate(160) which is expended in order to perpendicularly cross with the transporting shaft at the center; a roller block(170) which is fixed on the support plate; and a rotary roller which is installed on each roller block and drives with the transporting shaft. The rotary roller comprises an anti-slip ring.
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