PLASMA GENERATION APPARATUS, USING ELECTROMAGNETIC WAVES

摘要

PURPOSE: A plasma generation apparatus, using electromagnetic waves is provided to generates high density plasma of high temperature without an igniter by increasing the height and volume of a waveguide and increasing the average strength of electric field. CONSTITUTION: The waveguide(50) has a magnetron radiating electromagnetic wave. A dielectric tube(60) is installed in the waveguide and generates the plasma. The waveguide includes a first waveguide having a first height and a tapered part which is inclined from the end by a certain angle. A dielectric tube is included on the tapered part of the waveguide and a first waveguide or boundary.