摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device not fluctuating an oscillation frequency and preventing a piezoelectric vibration element from being damaged. SOLUTION: The piezoelectric device is provided with: a container body 110 in which a recessed space 111 is formed by providing a substrate part 110a and a frame part 110b on one principal surface of the substrate part 110a; a piezoelectric vibration element 120 which is mounted on a pair of two pads 113a, 113b provided on the one principal surface of the substrate part 110a exposing in the recessed space, and is provided with an excitation electrode 122; a cover 130 for air-tightly sealing the recessed space 111; a pair of two first support bumps P2 provided in a position being away from the piezoelectric vibration element mount pads 113a, 113b toward a center point of the substrate part 110a; and a pair of two second support bumps P3 extending from one end of the first support bumps P2 in a direction of longer side along the frame part side of the container body 110. COPYRIGHT: (C)2010,JPO&INPIT
|