发明名称 PULSE WIDTH CONTROLLER, AND LASER IRRADIATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To continuously vary the pulse width of a range of 10 to 1000 femtoseconds with a small configuration. SOLUTION: A pulse width controller (1) includes: laser beam transmission elements (18, 19, 23 and 24) that are arranged on an optical path of a femtosecond laser beam (3) and through which the femtosecond laser beam (3) transmits; an element moving device (13) for movably supporting the laser beam transmission elements (18, 19, 23 and 24) in the element moving direction tilting with respect to the optical path passing the inside of the laser beam transmission elements (18, 19, 23 and 24); and a pulse width control means (PC) for controlling the moving amount of the element moving device (13), controlling the optical path length of the femtosecond laser beam (3) passing the inside of the laser beam transmission elements (18, 19, 23 and 24), and varying the pulse width of the output femtosecond laser beam (3). COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010107777(A) 申请公布日期 2010.05.13
申请号 JP20080280360 申请日期 2008.10.30
申请人 UNIV OF MIYAZAKI 发明人 YOKOYA ATSUSHI
分类号 G02B26/02;H01S3/10 主分类号 G02B26/02
代理机构 代理人
主权项
地址