PROBE UNIT AND PROBE CARD HAVING THE SAME

摘要

PURPOSE: A probe unit and a probe card including the same are provided to control the number of semiconductors to be inspected through one inspection process by corresponding to the variation of the number of semiconductor devices formed on a wafer. CONSTITUTION: A probe unit comprises a block main body, a probe block(430) and a probe(410). The probe block comprises a first slit(433) and a second slit(432). The probe comprises a body, a first support unit(412), a beam unit(413), a tip unit(414), a second support unit(415), an elastic unit, and an interposer unit(417). The first support unit is supported by the first slit. The beam unit is bended and extended from one end of the body. The tip unit is bended and extended from the end of the beam unit. The second support unit is supported by the second slit. The elastic unit is positioned inside the second slit. The interposer unit is positioned outside the second slit.