METHOD FOR MEASURING EXPANSION/CONTRACTION, METHOD FOR PROCESSING SUBSTRATE, METHOD FOR PRODUCING DEVICE, APPARATUS FOR MEASURING EXPANSION/CONTRACTION, AND APPARATUS FOR PROCESSING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for measuring expansion/contraction state of an expandable/contractible substrate highly accurately. SOLUTION: The expansion/contraction measuring apparatus includes a transport section which transfers any flexible substrate along its surface; a detecting section formed on the substrate at certain intervals along the transfer direction of the substrate to detect a first and a second marks respectively relocated in a first and a second detection areas on the transfer route of this substrate along with its transportation; a substrate length setting section for setting the length of substrate along the transfer route between these first and second detection areas to reference length; and a deriving section which derives flexibility information on the transfer direction of the substrate based on the detection results of those first and second marks. COPYRIGHT: (C)2010,JPO&INPIT