| 摘要 |
It is an object of the present invention to provide an ultrasonic cleaning apparatus having a high cleaning efficiency by restraining lowering of the sound pressure applied to the object to be cleaned per unit time while securing the uniformization of the sound pressure in the entire area in the cleaning tank. An ultrasonic cleaning apparatus for cleaning an object to be cleaned by ultrasonic vibrations including: ultrasonic vibration generating means configured to generate a frequency modulated signal and generate the ultrasonic vibrations; and a cleaning tank configured to store cleaning liquid in which the object to be cleaned is to be immersed in the interior thereof and clean the object to be cleaned by the ultrasonic vibrations generated by the ultrasonic vibration generating means, characterized in that the signal includes at least two frequency modulated portions having modulation widths different from each other with a single frequency as a center frequency.
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