发明名称 |
METHOD OF PRODUCING NANOPATTERNED ARTICLES, AND ARTICLES PRODUCED THEREBY |
摘要 |
A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film. The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.
|
申请公布号 |
US2010112308(A1) |
申请公布日期 |
2010.05.06 |
申请号 |
US20090553401 |
申请日期 |
2009.09.03 |
申请人 |
RUSSELL THOMAS P;PARK SOOJIN;XU TING |
发明人 |
RUSSELL THOMAS P.;PARK SOOJIN;XU TING |
分类号 |
B32B3/10;B05D3/02;B05D5/00;B05D5/12;B32B3/26;C23F1/00 |
主分类号 |
B32B3/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|