MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A manufacturing method of an array substrate for a liquid crystal display is provided to effectively etch a molybdenum-titanium alloy layer and an indium oxide layer. CONSTITUTION: A molybdenum-titanium alloy layer or an indium oxide layer are formed. The molybdenum-titanium alloy layer or the indium oxide layer is etched by an etchant composition so that a pixel electrode is formed. The etchant composition comprises H2O2 of 10 to 25 weight%, a perfluorinated compound of 0.1 to 2 weight%, a heterocyclic amine compound of 0.1 to 5 weight%, and nitric acid of 0.1 to 5 weight%, and water for the remaining amount of the composition. An array panel for a liquid crystal display is a TFT array substrate.