发明名称 |
CHIP FOR CELL ELECTROPHYSIOLOGY SENSOR, CELL ELECTROPHYSIOLOGY SENSOR USING SAME, AND PRODUCTION METHOD OF CHIP FOR CELL ELECTROPHYSIOLOGY SENSOR |
摘要 |
<p>A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole. This cellular electrophysiology sensor chip can stably capture the test cell and provides a gigaseal stably even if test cells have different properties,</p> |
申请公布号 |
EP2180040(A1) |
申请公布日期 |
2010.04.28 |
申请号 |
EP20090804680 |
申请日期 |
2009.07.22 |
申请人 |
PANASONIC CORPORATION |
发明人 |
NAKATANI, MASAYA;USHIO, HIROSHI;YAMAMOTO, TAKEKI;TAKAHASHI, MAKOTO |
分类号 |
G01N33/487 |
主分类号 |
G01N33/487 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|