| 摘要 |
The present invention relates to a micromechanical Coriolis rate-of-rotation sensor for detecting a rate of rotation about a measurement axis which is denoted the X axis below, having a substrate, an oscillation structure and means for generating a rotational oscillation about an excitation axis (Z axis) which is orthogonal to the measurement axis, wherein the oscillation structure is rotatably connected to the substrate by means of first, inner suspension means or by means of a central suspension means, with the result that it can carry out rotational oscillations about a fulcrum relative to the substrate, wherein at least one pair of second suspension means also connects the oscillation structure to the substrate and is arranged on opposite sides of the fulcrum, wherein the at least one pair of second suspension means is arranged at a greater radial distance from the fulcrum than the first, inner suspension means or the central suspension means in order to provide a micromechanical Coriolis rate-of-rotation sensor with a response behaviour which can be designed in a manner specific to the axis of rotation and with sufficient sensitivity to rates of rotation in one or more directions of rotation, which sensor simultaneously has sufficient robustness with respect to the effect of external shock or vibration in the measuring direction or directions (about a detection axis) in order to meet the requirements for electronic signal processing as far as possible and, in particular, to counteract the risk of the oscillation structure sticking on the substrate. |
