| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator where an electrode can easily be arranged in a position relationship in which electrostatic force operates in a rocking direction of a moving part. Ž<P>SOLUTION: Moving part films 127a and 127b are vapor-deposited on a surface of a moving part side electrode 123a facing the same direction as a mirror plane 124 and a surface of a moving part side electrode 123b facing the same direction as a backside 125. The moving part films 127a and 127b are formed of Si<SB>3</SB>N<SB>4</SB>. Si<SB>3</SB>N<SB>4</SB>generates tensile stress of 210 MPa under a prescribed condition. Thus, the moving part side electrode 123a bends so that a chip faces a direction of the backside 125, and the moving part side electrode 123b bends so that a chip faces a direction of the mirror plane 124. Fixing part films 112a and 112b are vapor-deposited and fixing part side electrode 111a and the fixing part side electrode 111b similarly bend. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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